FEI Nova 200 Dual-Beam SEM/FIB

This instrument can be downloaded and is provided here in Adobe PDF formats.



  • FEG scanning electron microscope
  • Ion column with Ga liquid ion source for milling
  • GIS for Pt deposition
  • Kliendiek nanomanipulator for specimen lift-out
  • AutoTEM, AutoFIB, and slice and view automation software

Current Research Activities:

  • Support instrument for atom probe and TEM specimen preparation
  • Support instrument for nanoindentor and micropillar preparation
  • 3D reconstruction of microstructural features

Contact: M.K. Miller, (865) 574-4719



 Oak Ridge National Laboratory