PHI 680 Scanning Auger Nanoprobe

This instrument can be downloaded and is provided here in Adobe PDF formats.




  • Provides elemental and some chemical information
  • Surface sensitive (top 3-5 nm)
  • High spatial resolution
  • Ar+-ion depth profiling
  • In-situ fracture stage

Current Research Activities:

  • Grain boundary characterization of metals and alloys
  • 3-D thin film characterization using elemental mapping and depth profiling
  • Corrosion and failure analysis

Contact: Harry M. Meyer, (865) 574-5092




 Oak Ridge National Laboratory